검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Transmission electron microscopy study of simultaneous high-dose C++N+ co-implantation into (111)Si Morales FM, Molina SI, Ponce A, Araujo D, Garcia R, Barbadillo L, Cervera M, Piqueras J Thin Solid Films, 426(1-2), 16, 2003 |
| 2 |
Low-energy carbon and nitrogen ion implantation in silicon Barbadillo L, Hernandez MJ, Cervera M, Rodriguez P, Piqueras J, Munoz-Yague A Journal of Vacuum Science & Technology B, 19(4), 1124, 2001 |
| 3 |
Amorphous CNx layers from neon electron cyclotron resonance plasmas with N-2 and CH4 as precursors Barbadillo L, Hernandez MJ, Cervera M, Piqueras J Journal of the Electrochemical Society, 147(10), 3864, 2000 |