검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Sn etching with hydrogen radicals to clean EUV optics van Herpen MMJW, Klunder DJW, Soer WA, Moors R, Banine V Chemical Physics Letters, 484(4-6), 197, 2010 |
| 2 |
Particle Cleaning of EUV Reticles Scaccabarozzi L, Lammers NA, Moors R, Banine V Journal of Adhesion Science and Technology, 23(12), 1603, 2009 |
| 3 |
Extreme ultraviolet lithography: Status and prospects Benschop J, Banine V, Lok S, Loopstra E Journal of Vacuum Science & Technology B, 26(6), 2204, 2008 |