검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Microfabrication of silicon tip structures for multiple-probe scanning tunneling microscopy Bale M, Palmer RE Journal of Vacuum Science & Technology B, 20(1), 364, 2002 |
| 2 |
Deep plasma etching of piezoelectric PZT with SF6 Bale M, Palmer RE Journal of Vacuum Science & Technology B, 19(6), 2020, 2001 |
| 3 |
Reactive ion etching of piezoelectric Pb(ZrxTi1-x)O-3 in a SF6 plasma Bale M, Palmer RE Journal of Vacuum Science & Technology A, 17(5), 2467, 1999 |