검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Formation of body-centered-cubic tantalum via sputtering on low-kappa dielectrics at low temperatures Senkevich JJ, Karabacak T, Bae DL, Cale TS Journal of Vacuum Science & Technology B, 24(2), 534, 2006 |
| 2 |
Direct copper electroless deposition on a tungsten barrier layer for ultralarge scale integration Kim YS, Bae DL, Yang HC, Shin HS, Wang GW, Senkevich JJ, Lu TM Journal of the Electrochemical Society, 152(2), C89, 2005 |