검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Transfer etching of bilayer resists in oxygen-based plasmas Mahorowala AP, Babich K, Lin Q, Medeiros DR, Petrillo K, Simons J, Angelopoulos M, Sooriyakumaran R, Hofer D, Reynolds GW, Taylor JW Journal of Vacuum Science & Technology A, 18(4), 1411, 2000 |