화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 High-stability hydrogenated amorphous silicon films for light-soaking prepared by catalytic CVD at high deposition rates
Itoh M, Ishibashi Y, Masuda A, Matsumura H
Thin Solid Films, 395(1-2), 138, 2001
2 Large-grain polycrystalline silicon thin films obtained by low-temperature stepwise annealing of hydrogenated amorphous silicon
Ruther R, Livingstone J, Dytlewski N
Thin Solid Films, 310(1-2), 67, 1997
3 Infrared Spectroscopic Study of the Adsorption and Dissociation of CH2Cl2 on Pd/SiO2 - Generation of CH2 Species
Solymosi F, Rasko J
Journal of Catalysis, 155(1), 74, 1995
4 Si-Rich Surface-Layer of Photochemically Deposited Silicon-Nitride
Wadayama T, Shibata H, Kobayashi T, Hatta A
Journal of Materials Science, 29(4), 1041, 1994