검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Photoenhanced reactive ion etching of III-V nitrides in BCl3/Cl-2/Ar/N-2 plasmas Tempez A, Medelci N, Badi N, Berishev I, Starikov D, Bensaoula A Journal of Vacuum Science & Technology A, 17(4), 2209, 1999 |
| No. | Article |
|---|---|
| 1 |
Photoenhanced reactive ion etching of III-V nitrides in BCl3/Cl-2/Ar/N-2 plasmas Tempez A, Medelci N, Badi N, Berishev I, Starikov D, Bensaoula A Journal of Vacuum Science & Technology A, 17(4), 2209, 1999 |