검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Optical emission characteristics and mode transitions in low-frequency inductively coupled plasmas Ostrikov KN, Xu S, Azam ABMS Journal of Vacuum Science & Technology A, 20(1), 251, 2002 |
| No. | Article |
|---|---|
| 1 |
Optical emission characteristics and mode transitions in low-frequency inductively coupled plasmas Ostrikov KN, Xu S, Azam ABMS Journal of Vacuum Science & Technology A, 20(1), 251, 2002 |