검색결과 : 7건
| No. | Article |
|---|---|
| 1 |
Effect of thermal annealing on the structural and mechanical properties of amorphous silicon carbide films prepared by polymer-source chemical vapor deposition Awad Y, El Khakani MA, Brassard D, Smirani R, Camire N, Lessard M, Aktik C, Scarlete M, Mouine J Thin Solid Films, 518(10), 2738, 2010 |
| 2 |
Electrical characterization of amorphous silicon carbide thin films deposited via polymeric source chemical vapor deposition Fanaei T, Camjre N, Aktik C, Gujrathi S, Lessard A, Awad Y, Oulachgar E, Scarlete M Thin Solid Films, 516(12), 3755, 2008 |
| 3 |
Thermally induced interfacial interactions between. various metal substrates and a-SiC thin films deposited by a polymer-source chemical vapor deposition Awad Y, Khakani MA, Aktik C, Mouine J, Camire N, Lessard M, Scarlete M Materials Chemistry and Physics, 104(2-3), 350, 2007 |
| 4 |
Nickel pulse reversal plating for image reversal of ultrathin electron beam resist Awad Y, Lavallee E, Beauvais J, Drouin D, Mun LK, Yang P, Cloutier M, Turcotte D Thin Solid Films, 515(5), 3040, 2007 |
| 5 |
Nano patterning on optical fiber and laser diode facet with dry resist Kelkar PS, Beauvais J, Lavallee E, Drouin D, Cloutier M, Turcotte D, Yang P, Mun LK, Legario R, Awad Y, Aimez V Journal of Vacuum Science & Technology A, 22(3), 743, 2004 |
| 6 |
Arrays of holes fabricated by electron-beam lithography combined with image reversal process using nickel pulse reversal plating Awad Y, Lavallee E, Lau KM, Beauvais J, Drouin D, Cloutier M, Turcotte D, Yang P, Kelkar P Journal of Vacuum Science & Technology A, 22(3), 1040, 2004 |
| 7 |
Fabrication of x-ray masks using evaporated electron sensitive layers for back patterning of membranes Awad Y, Lavallee E, Beauvais J, Drouin D, Yang P, Turcotte D, Mun LK Journal of Vacuum Science & Technology B, 20(6), 3040, 2002 |