검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Investigation on the surface characterization of Ga-faced GaN after chemical-mechanical polishing Gong H, Pan GS, Zhou Y, Shi XL, Zou CL, Zhang SA Applied Surface Science, 338, 85, 2015 |
| 2 |
XPS, UV-vis spectroscopy and AFM studies on removal mechanisms of Si-face SiC wafer chemical mechanical polishing (CMP) Zhou Y, Pan GS, Shi XL, Xu L, Zou CL, Gong H, Luo GH Applied Surface Science, 316, 643, 2014 |