검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Highly piezoelectric AlN thin films grown on amorphous, insulating substrates Artieda A, Sandu C, Muralt P Journal of Vacuum Science & Technology A, 28(3), 390, 2010 |
| No. | Article |
|---|---|
| 1 |
Highly piezoelectric AlN thin films grown on amorphous, insulating substrates Artieda A, Sandu C, Muralt P Journal of Vacuum Science & Technology A, 28(3), 390, 2010 |