검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
High resolution medium energy ion scattering analysis for the quantitative depth profiling of ultrathin high-k layers Reading MA, van den Berg JA, Zalm PC, Armour DG, Bailey P, Noakes TCQ, Parisini A, Conard T, De Gendt S Journal of Vacuum Science & Technology B, 28(1), C1C65, 2010 |
| 2 |
Ultralow energy ion beam surface modification of low density polyethylene Shenton MJ, Bradley JW, van den Berg JA, Armour DG, Stevens GC Journal of Physical Chemistry B, 109(47), 22085, 2005 |
| 3 |
Characterization by medium energy ion scattering of damage and dopant profiles produced by ultrashallow B and As implants into Si at different temperatures Van den Berg JA, Armour DG, Zhang S, Whelan S, Ohno H, Wang TS, Cullis AG, Collart EHJ, Goldberg RD, Bailey P, Noakes TCQ Journal of Vacuum Science & Technology B, 20(3), 974, 2002 |
| 4 |
In-Situ Study of Processes Taking Place on Silicon Surface During Its Bombardment by Cfx/Ar Ions - Etching Versus Polymerization Sikola T, Armour DG, Vandenberg JA Journal of Vacuum Science & Technology A, 14(6), 3156, 1996 |