검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Cluster formation during annealing of ultra-low-energy boron-implanted silicon Collart EJH, Murrell AJ, Foad MA, van den Berg JA, Zhang S, Armour D, Goldberg RD, Wang TS, Cullis AG Journal of Vacuum Science & Technology B, 18(1), 435, 2000 |