검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Deposition damage evaluation of fluorine doped silicon oxide using simple damage monitoring system Kim DH, Kim B, Lee J, Song JT Thin Solid Films, 518(22), 6482, 2010 |
| No. | Article |
|---|---|
| 1 |
Deposition damage evaluation of fluorine doped silicon oxide using simple damage monitoring system Kim DH, Kim B, Lee J, Song JT Thin Solid Films, 518(22), 6482, 2010 |