화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 X-ray photoelectron spectroscopy characterization of the oxidation of electroplated and sputter deposited copper surfaces
Apen E, Rogers BR, Sellers JA
Journal of Vacuum Science & Technology A, 16(3), 1227, 1998
2 Study of platinum electrode patterning in a reactive ion etcher
Chang LH, Apen E, Kottke M, Tracy C
Journal of Vacuum Science & Technology A, 16(3), 1489, 1998
3 Glass and Polymer-Based Dosing System for the Introduction of Reactive Gases into Ultrahigh-Vacuum
Apen E, Wentz R, Pompei F, Gland JL
Journal of Vacuum Science & Technology A, 12(5), 2946, 1994