검색결과 : 3건
No. | Article |
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1 |
X-ray photoelectron spectroscopy characterization of the oxidation of electroplated and sputter deposited copper surfaces Apen E, Rogers BR, Sellers JA Journal of Vacuum Science & Technology A, 16(3), 1227, 1998 |
2 |
Study of platinum electrode patterning in a reactive ion etcher Chang LH, Apen E, Kottke M, Tracy C Journal of Vacuum Science & Technology A, 16(3), 1489, 1998 |
3 |
Glass and Polymer-Based Dosing System for the Introduction of Reactive Gases into Ultrahigh-Vacuum Apen E, Wentz R, Pompei F, Gland JL Journal of Vacuum Science & Technology A, 12(5), 2946, 1994 |