검색결과 : 7건
| No. | Article |
|---|---|
| 1 |
Carbonization and transition layer effects on 3C-SiC film residual stress Anzalone R, Litrico G, Piluso N, Reitano R, Alberti A, Fiorenza P, Coffa S, La Via F Journal of Crystal Growth, 473, 11, 2017 |
| 2 |
Wafer Cut Effect on Hetero-Epitaxial 3C-SiC Film for MEMS Application Anzalone R, Camarda M, Auditore A, Piluso N, Severino A, La Magna A, D'Arrigo G, La Via F Electrochemical and Solid State Letters, 15(6), H182, 2012 |
| 3 |
Stress fields analysis in 3C-SiC free-standing microstructures by micro-Raman spectroscopy Piluso N, Anzalone R, Camarda M, Severino A, D'Arrigo G, La Via F Thin Solid Films, 522, 20, 2012 |
| 4 |
Study of microstructure deflections and film/substrate curvature under generalized stress fields and mechanical properties Camarda M, Anzalone R, La Magna A, La Via F Thin Solid Films, 522, 26, 2012 |
| 5 |
Defect Influence on Heteroepitaxial 3C-SiC Young's Modulus Anzalone R, Camarda M, Canino A, Piluso N, La Via F, D'Arrigo D Electrochemical and Solid State Letters, 14(4), H161, 2011 |
| 6 |
Defect Influence on Heteroepitaxial 3C-SiC Young's Modulus (vol 14, H161, 2011) Anzalone R, Camarda M, Canino A, Piluso N, La Via F, D'Arrigo G Electrochemical and Solid State Letters, 14(7), S3, 2011 |
| 7 |
Low Stress Heteroepitaxial 3C-SiC Films Characterized by Microstructure Fabrication and Finite Elements Analysis Anzalone R, Camarda M, Locke C, Alquier D, Severino A, Italia M, Rodilosso D, Tringali C, La Magna A, Foti G, Saddow SE, La Via F, D'Arrigo G Journal of the Electrochemical Society, 157(4), H438, 2010 |