검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Deuterium sintering of silicon-on-insulator structures: D diffusion and replacement reactions at the SiO2/Si interface Wallace RM, Chen PJ, Archer LB, Anthony JM Journal of Vacuum Science & Technology B, 17(5), 2153, 1999 |
| 2 |
The Effect of Tilt Angle on as Implants in Si Anthony JM, Keenan JA Journal of Vacuum Science & Technology A, 13(3), 1321, 1995 |
| 3 |
Accelerator Based Secondary-Ion Mass-Spectrometry for Impurity Analysis Anthony JM, Kirchhoff JF, Marble DK, Renfrow SN, Kim YD, Matteson S, Mcdaniel FD Journal of Vacuum Science & Technology A, 12(4), 1547, 1994 |