화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Modeling and process optimization of ZnSe and ZnS epitaxial growth in a vertical metallorganic vapor-phase epitaxy reactor
Thiandoume C, Angermeier D, Gorochov O
Journal of the Electrochemical Society, 145(8), 2887, 1998
2 Initial Growth-Processes in the Epitaxy of Ge and GeH4 on Oxidized Si Substrates
Angermeier D, Kuhn WS, Druihle R, Ballutaud D, Triboulet R
Journal of the Electrochemical Society, 144(2), 694, 1997
3 Modeling and Analysis of the Silicon Epitaxial-Growth with Sihcl3 in a Horizontal Rapid Thermal Chemical-Vapor-Deposition Reactor
Angermeier D, Monna R, Slaoui A, Muller JC
Journal of the Electrochemical Society, 144(9), 3256, 1997