검색결과 : 27건
| No. | Article |
|---|---|
| 1 |
Control of surface mobility for conformal deposition of Mo-Si multilayers on saw-tooth substrates Voronov DL, Anderson EH, Gullikson EM, Salmassi F, Warwick T, Yashchuk VV, Padmore HA Applied Surface Science, 284, 575, 2013 |
| 2 |
Extreme ultraviolet mask substrate surface roughness effects on lithographic patterning George SA, Naulleau PP, Mochi I, Salmassi F, Gullikson EM, Goldberg KA, Anderson EH Journal of Vacuum Science & Technology B, 28(6), C6E23, 2010 |
| 3 |
Quasi-ballistic thermal transport from nanoscale interfaces observed using ultrafast coherent soft X-ray beams Siemens ME, Li Q, Yang RG, Nelson KA, Anderson EH, Murnane MM, Kapteyn HC Nature Materials, 9(1), 26, 2010 |
| 4 |
Development of pseudorandom binary arrays for calibration of surface profile metrology tools Barber SK, Soldate P, Anderson EH, Cambie R, McKinney WR, Takacs PZ, Voronov DL, Yashchuk VV Journal of Vacuum Science & Technology B, 27(6), 3213, 2009 |
| 5 |
Actinic extreme ultraviolet mask inspection beyond 0.25 numerical aperture Goldberg KA, Naulleau P, Mochi I, Anderson EH, Rekawa SB, Kemp CD, Gunion RF, Han HS, Huh S Journal of Vacuum Science & Technology B, 26(6), 2220, 2008 |
| 6 |
Multilayer phase-only diffraction gratings: Fabrication and application to extreme ultraviolet optics Salmassi F, Gullikson EM, Anderson EH, Naulleau PP Journal of Vacuum Science & Technology B, 25(6), 2055, 2007 |
| 7 |
Soft x-ray imaging of spin dynamics at high spatial and temporal resolution Mesler BL, Fischer P, Chao W, Anderson EH, Kim DH Journal of Vacuum Science & Technology B, 25(6), 2598, 2007 |
| 8 |
Shot noise models for sequential processes and the role of lateral mixing Neureuther AR, Pease RFW, Yuan L, Parizi KB, Esfandyarpour H, Poppe WJ, Liddle JA, Anderson EH Journal of Vacuum Science & Technology B, 24(4), 1902, 2006 |
| 9 |
At-wavelength alignment and testing of the 0.3 NA MET optic Goldberg KA, Naulleau PP, Denham PE, Rekawa SB, Jackson K, Anderson EH, Liddle JA Journal of Vacuum Science & Technology B, 22(6), 2956, 2004 |
| 10 |
Lithographic characterization of the printability of programmed extreme ultraviolet substrate defects Naulleau P, Goldberg KA, Anderson EH, Bokor J, Gullikson E, Harteneck B, Jackson K, Olynick D, Salmassi F, Baker S, Mirkarimi P, Spiller E, Walton C, Zhang GJ Journal of Vacuum Science & Technology B, 21(4), 1286, 2003 |