검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Accurate control of remaining resist depth for nanoscale three-dimensional structures in electron-beam grayscale lithography Lee SY, Anbumony K Journal of Vacuum Science & Technology B, 25(6), 2008, 2007 |
| 2 |
True three-dimensional proximity effect correction in electron-beam lithography Anbumony K, Lee SY Journal of Vacuum Science & Technology B, 24(6), 3115, 2006 |