| 1 |
SiH4 enhanced dissociation via argon plasma assistance for hydrogenated microcrystalline silicon thin-film deposition and application in tandem solar cells
Li TT, Xu SZ, Huang Q, Ren HZ, Ni J, Li BZ, Zhang DK, Wei CC, Amanatides E, Mataras D, Zhao Y, Zhang XD
Solar Energy Materials and Solar Cells, 180, 110, 2018 |
| 2 |
Modeling and experiments of high-pressure VHFSiH4/H-2 discharges for higher microcrystalline silicon deposition rate
Zhang XD, Zhang FR, Amanatides E, Mataras D, Zhao Y
Thin Solid Films, 516(20), 6829, 2008 |
| 3 |
Effect of substrate bias on the plasma enhanced chemical vapor deposition of microcrystalline silicon thin films
Zhang XD, Zhang FR, Amanatides E, Mataras D, Zhao Y
Thin Solid Films, 516(20), 6912, 2008 |
| 4 |
Effect of plasma parameters on the amorphous to microcrystalline silicon transition
Katsia E, Amanatides E, Mataras D, Rapakoulias DE
Thin Solid Films, 511, 285, 2006 |
| 5 |
Temperature effect and stress on microcrystalline silicon thin films deposited under high pressure plasma conditions
Amanatides E, Katsia E, Mataras D, Soto A, Voyiatzis GA
Thin Solid Films, 511, 603, 2006 |
| 6 |
Total SiH4/H-2 pressure effect on microcrystalline silicon thin films growth and structure
Katsia E, Amanatides E, Mataras D, Soto A, Voyiatzis GA
Solar Energy Materials and Solar Cells, 87(1-4), 157, 2005 |
| 7 |
Plasma emission diagnostics for the transition from microcrystalline to amorphous silicon solar cells
Amanatides E, Mataras D, Rapakoulias D, van den Donker MN, Rech B
Solar Energy Materials and Solar Cells, 87(1-4), 795, 2005 |
| 8 |
PECVD of hydrogenated silicon thin films from SiH4+H-2+Si2H6
Hammad A, Amanatides E, Mataras D, Rapakoulias D
Thin Solid Films, 451-52, 255, 2004 |
| 9 |
Combined effect of electrode gap and radio frequency on power deposition and film growth kinetics in SiH4/H-2 discharges
Amanatides E, Mataras D, Rapakoulias DE
Journal of Vacuum Science & Technology A, 20(1), 68, 2002 |
| 10 |
Deposition rate optimization in SiH4/H-2 PECVD of hydrogenated microcrystalline silicon
Amanatides E, Mataras D, Rapakoulias DE
Thin Solid Films, 383(1-2), 15, 2001 |
