검색결과 : 1건
No. | Article |
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1 |
Effects of duty cycle and pulse frequency on the fabrication of AlCrN thin films deposited by high power impulse magnetron sputtering Hsiao YC, Lee JW, Yang YC, Lou BS Thin Solid Films, 549, 281, 2013 |
No. | Article |
---|---|
1 |
Effects of duty cycle and pulse frequency on the fabrication of AlCrN thin films deposited by high power impulse magnetron sputtering Hsiao YC, Lee JW, Yang YC, Lou BS Thin Solid Films, 549, 281, 2013 |