검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Chemical, optical and transport characterization of ALD modified nanoporous alumina based structures Cuevas AL, Yuso VMD, Gelde L, Gonzalez AS, Vega V, Prida VM, Benavente J Journal of Industrial and Engineering Chemistry, 91, 139, 2020 |
| 2 |
Experimental and numerical investigations into the transient multi-wafer batch atomic layer deposition process with vertical and horizontal wafer arrangements Pan DQ, Ma LL, Xie YY, Wang FF, Jen TC, Yuan C International Journal of Heat and Mass Transfer, 91, 416, 2015 |
| 3 |
Investigating phosphonate monolayer stability on ALD oxide surfaces Branch B, Dubey M, Anderson AS, Artyushkova K, Baldwin JK, Petsev D, Dattelbaum AM Applied Surface Science, 288, 98, 2014 |