검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Characterization of a large area scanning PECVD deposition system with small size RF electrodes Yin Y, Hang L, Proschek M, McKenzie DR, Bilek MMM, Allan S, Han J, Rubanov S, Lauder RDT, Godfrey RB Thin Solid Films, 515(1), 307, 2006 |