화학공학소재연구정보센터
검색결과 : 6건
No. Article
1 On the impact of silicon nitride technology on charge trap NAND memories
Sebastiani A, Scozzari C, Mauri A, Modelli A, Albini G, Piagge R, Bacciaglia P, Del Vitto A, Alessandri M, Grossi A, Tessariol P, Ghidini G
Journal of Vacuum Science & Technology B, 27(1), 490, 2009
2 Metrology issues in thin ONO stacks measurements by spectroscopic ellipsometry and X-ray reflectivity
Bellandi E, Elbaz A, Spadoni S, Piagge R, Coccorese C, Pavia G, Ferrari S, Banerjee S, Alessandri M
Thin Solid Films, 450(1), 120, 2004
3 Nitridation of thin gate or tunnel oxides by nitric oxide
Gerardi C, Zonca R, Crivelli B, Alessandri M
Journal of the Electrochemical Society, 146(8), 3058, 1999
4 Influence of roughness and grain dimension on the optical functions of polycrystalline silicon films
Borghesi A, Tallarida G, Amore G, Cazzaniga F, Queirolo G, Alessandri M, Sassella A
Thin Solid Films, 313-314, 243, 1998
5 Electrical Characterization of Highly Reliable 8 nm Oxide
Ghidini G, Alessandri M, Clementi C, Drera D, Pellizzer F
Journal of the Electrochemical Society, 144(2), 758, 1997
6 Optical-Properties of Polycrystalline Silicon Thin-Films Deposited by Single-Wafer Chemical-Vapor-Deposition
Marazzi M, Giardini ME, Borghesi A, Sassella A, Alessandri M, Ferroni G
Thin Solid Films, 296(1-2), 91, 1997