검색결과 : 10건
| No. | Article |
|---|---|
| 1 |
Two-Facing-Targets (TFT) 스퍼터링장치를 이용하여 증착한 AlN박막의 잔류응력 측정 한창석, 권용준 Korean Journal of Materials Research, 31(12), 697, 2021 |
| 2 |
Growth of high quality AlN films on CVD diamond by RF reactive magnetron sputtering Chen LX, Liu H, Liu S, Li CM, Wang YC, An K, Hua CY, Liu JL, Wei JJ, Hei LF, Lv FX Applied Surface Science, 431, 152, 2018 |
| 3 |
Structural, mechanical and piezoelectric properties of polycrystalline AlN films sputtered on titanium bottom electrodes Patru M, Isac L, Cunha L, Martins P, Lanceros-Mendez S, Oncioiu G, Cristea D, Munteanu D Applied Surface Science, 354, 267, 2015 |
| 4 |
Structure and electrical properties of AlN films prepared on PZT layers with different orientations Meng XQ, Yang CT, Yang JC Journal of Crystal Growth, 386, 57, 2014 |
| 5 |
The effect of geometry and post-annealing on surface acoustic wave characteristics of AlN thin films prepared by magnetron sputtering Phan DT, Chung GS Applied Surface Science, 257(20), 8696, 2011 |
| 6 |
AlN:Cr thin films synthesized by pulsed laser deposition: Studies by X-ray diffraction and spectroscopic ellipsometry Szekeres A, Bakalova S, Grigorescu S, Cziraki A, Socol G, Ristoscu C, Mihailescu IN Applied Surface Science, 255(10), 5271, 2009 |
| 7 |
AlN thin films deposited by pulsed laser ablation, sputtering and filtered arc techniques Bathe R, Vispute RD, Habersat D, Sharma RP, Venkatesan T, Scozzie CJ, Ervin M, Geil BR, Lelis AJ, Dikshit SJ, Bhattacharya R Thin Solid Films, 398-399, 575, 2001 |
| 8 |
Spectrophotometric analysis of aluminum nitride thin films Joo HY, Kim HJ, Kim SJ, Kim SY Journal of Vacuum Science & Technology A, 17(3), 862, 1999 |
| 9 |
Simulation of thermionic emission from aluminum gallium nitride cathodes at elevated temperatures Hatfield CW, Bilbro GL Journal of Vacuum Science & Technology B, 17(5), 1987, 1999 |
| 10 |
Preparation of Compositionally Gradient Ti-Tin Films by RF Reactive Sputtering Inoue S, Ucihda H, Takeshita K, Koterasawa K, Howson RP Thin Solid Films, 261(1-2), 115, 1995 |