검색결과 : 12건
| No. | Article |
|---|---|
| 1 |
원자층 증착법을 이용한 AlN 박막의 성장 및 응용 동향 윤희주, 김호경, 최병준 Korean Journal of Materials Research, 29(9), 567, 2019 |
| 2 |
A kinetics model for MOCVD deposition of AlN film based on Grove theory Pu KW, Dai XY, Miao DM, Wu SJ, Zhao TL, Hao Y Journal of Crystal Growth, 478, 42, 2017 |
| 3 |
AlN films prepared on 6H-SiC substrates under various sputtering pressures by RF reactive magnetron sputtering Kuang XP, Zhang HY, Wang GG, Cui L, Zhu C, Jin L, Sun R, Han JC Applied Surface Science, 263, 62, 2012 |
| 4 |
Influence of molybdenum bottom electrodes on crystal growth of aluminum nitride thin films Kamohara T, Akiyama M, Kuwano N Journal of Crystal Growth, 310(2), 345, 2008 |
| 5 |
Epitaxial growth of cubic AlN films on SrTiO3(100) substrates by pulsed laser deposition Zhu J, Zhao D, Luo WB, Zhang Y, Li YR Journal of Crystal Growth, 310(4), 731, 2008 |
| 6 |
Structure and RT ferromagnetism of Fe-doped AlN films Gao XD, Jiang EY, Liu HH, Mi WB, Li ZQ, Wu P, Bai HL Applied Surface Science, 253(12), 5431, 2007 |
| 7 |
Effects of bottom electrodes on the orientation of AlN films and the frequency responses of resonators in AlN-based FBARs Lee JB, Jung JP, Lee MH, Park JS Thin Solid Films, 447, 610, 2004 |
| 8 |
AIN films deposited under various nitrogen concentrations by RF reactive sputtering Cheng H, Sun Y, Zhang JX, Zhang YB, Yuan S, Hing P Journal of Crystal Growth, 254(1-2), 46, 2003 |
| 9 |
Fabrication of SOI structure with AlN film as buried insulator by Ion-Cut process Men CL, Xu Z, An ZH, Chu PK, Wan Q, Xie XY, Lin CL Applied Surface Science, 199(1-4), 287, 2002 |
| 10 |
Stress generation during ion beam-assisted pulsed laser deposition of thin AlN films Six S, Rauschenbach B Thin Solid Films, 415(1-2), 285, 2002 |