검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
The growth of low resistivity, heavily Al-doped 4H-SiC thick epilayers by hot-wall chemical vapor deposition Ji SY, Kojima K, Ishida Y, Saito S, Kato T, Tsuchida H, Yoshida S, Okumura H Journal of Crystal Growth, 380, 85, 2013 |