화학공학소재연구정보센터
검색결과 : 8건
No. Article
1 Effect of thermal annealing on the structural and mechanical properties of amorphous silicon carbide films prepared by polymer-source chemical vapor deposition
Awad Y, El Khakani MA, Brassard D, Smirani R, Camire N, Lessard M, Aktik C, Scarlete M, Mouine J
Thin Solid Films, 518(10), 2738, 2010
2 Electrical characterization of amorphous silicon carbide thin films deposited via polymeric source chemical vapor deposition
Fanaei T, Camjre N, Aktik C, Gujrathi S, Lessard A, Awad Y, Oulachgar E, Scarlete M
Thin Solid Films, 516(12), 3755, 2008
3 Thermally induced interfacial interactions between. various metal substrates and a-SiC thin films deposited by a polymer-source chemical vapor deposition
Awad Y, Khakani MA, Aktik C, Mouine J, Camire N, Lessard M, Scarlete M
Materials Chemistry and Physics, 104(2-3), 350, 2007
4 Chemical and structural characterization of SiONC dielectric thin film deposited by PSCVD
Oulachgar EH, Aktik C, Dostie S, Sowerby R, Gujrathi S, Scarlete M
Journal of the Electrochemical Society, 153(11), F255, 2006
5 Passivation of GaAs using P2S5/(NH4)(2)S+Se and (NH4)(2)S+Se
Fanaei T, Aktik C
Journal of Vacuum Science & Technology A, 22(3), 874, 2004
6 Fabrication of (NH4)(2)S passivated GaAs metal-insulator-semiconductor devices using low-frequency plasma-enhanced chemical vapor deposition
Jaouad A, Aimez V, Aktik C, Bellatreche K, Souifi A
Journal of Vacuum Science & Technology A, 22(3), 1027, 2004
7 Passivation of GaAs metal-insulator-semiconductor structures by (NH4)(2)S-x and by evaporation Of SiO2
Jaouad A, Aktik C
Journal of Vacuum Science & Technology A, 20(3), 1154, 2002
8 Interface states distribution in electrical stressed oxynitrided gate-oxide
Belkouch S, Nguyen TK, Landsberger LM, Aktik C, Jean C, Kahrizi M
Journal of the Electrochemical Society, 145(7), 2489, 1998