검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Deposition of WNxCy from the Tungsten Piperidylhydrazido Complex Cl-4(CH3CN) W(N-pip) as a Single-Source Precursor Kim D, Kim OH, Ajmera HM, Anderson T, Koller J, Abboud KA, McElwee-White L Journal of the Electrochemical Society, 158(6), H618, 2011 |
| 2 |
Deposition of WN(x)C(y) thin films for diffusion barrier application using the dimethylhydrazido (2(-)) tungsten complex (CH(3)CN)Cl(4)W(NNMe(2)) Ajmera HM, Anderson TJ, Koller J, McElwee-White L, Norton DP Thin Solid Films, 517(21), 6038, 2009 |
| 3 |
Synthesis and characterization of diorganohydrazido(2-) tungsten complexes Koller J, Ajmera HM, Abboud KA, Anderson TJ, McElwee-White L Inorganic Chemistry, 47(11), 4457, 2008 |
| 4 |
Deposition of WNxCy using the allylimido complexes Cl-4(RCN)W(NC3H5): Effect of NH3 on film properties Ajmera HM, Heitsch AT, Bchir OJ, Norton DP, Reitfort LL, McElwee-White L, Anderson TJ Journal of the Electrochemical Society, 155(10), H829, 2008 |
| 5 |
Deposition of WNxCy for diffusion barrier application using the imido guanidinato complex W((NPr)-Pr-i)Cl-3[(PrNC)-Pr-i(NMe2)(NPr)-Pr-i] Ajmera HM, Heitsch AT, Anderson TJ, Wilder CB, Reitfort LL, McElwee-White L, Norton DP Journal of Vacuum Science & Technology B, 26(5), 1800, 2008 |
| 6 |
Tungsten allylimido complexes Cl-4(RCN)W(NC3H5) as single-source CVD precursors for WNxCy thin films. Correlation of precursor fragmentation to film properties Bchir OJ, Green KM, Ajmera HM, Zapp EA, Anderson TJ, Brooks BC, Reitfort LL, Powell DH, Abboud KA, McElwee-White L Journal of the American Chemical Society, 127(21), 7825, 2005 |