검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effect of Beam Condition in Variable-Shaped Electron-Beam Direct Writing for 0.25 Mu-M and Below Hirasawa S, Nakajima K, Tamura T, Aizaki N Journal of Vacuum Science & Technology B, 11(6), 2319, 1993 |
| No. | Article |
|---|---|
| 1 |
Effect of Beam Condition in Variable-Shaped Electron-Beam Direct Writing for 0.25 Mu-M and Below Hirasawa S, Nakajima K, Tamura T, Aizaki N Journal of Vacuum Science & Technology B, 11(6), 2319, 1993 |