검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Accurate Secondary-Ion Mass-Spectrometry Analysis of Shallow Doping Profiles in Si Based on the Internal Standard Method Liu GL, Uchida H, Aikawa I, Kuroda S, Hirashita N Journal of Vacuum Science & Technology B, 14(1), 324, 1996 |