화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 Trap Generation in Buried Oxides of Silicon-on-Insulator Structures by Vacuum-Ultraviolet Radiation
Afanasev VV, Stesmans A, Revesz AG, Hughes HL
Journal of the Electrochemical Society, 144(2), 749, 1997
2 Conducting and Charge-Trapping Defects in Buried Oxide Layers of Simox Structures
Afanasev VV, Brown GA, Hughes HL, Liu ST, Revesz AG
Journal of the Electrochemical Society, 143(1), 347, 1996
3 Confinement Phenomena in Buried Oxides of Simox Structures as Affected by Processing
Afanasev VV, Revesz AG, Hughes HL
Journal of the Electrochemical Society, 143(2), 695, 1996
4 Charge Instability of Bonded Silicon Dioxide Layer Induced by Wet-Processing
Afanasev VV, Revesz AG, Brown GA, Hughes HL
Journal of the Electrochemical Society, 142(6), 1983, 1995
5 Deep and Shallow Electron Trapping in the Buried Oxide Layer of Simox Structures
Afanasev VV, Revesz AG, Brown GA, Hughes HL
Journal of the Electrochemical Society, 141(10), 2801, 1994