검색결과 : 4건
No. | Article |
---|---|
1 |
Copper ion transport induced dielectric failure: Inclusion of elastic drift and consequences for reliability (vol 26, pg 1497, 2008) Achanta RS, Plawsky JL, Gill WN Journal of Vacuum Science & Technology A, 27(1), 165, 2009 |
2 |
The effect of metallic barriers in inhibiting copper ion transport in low-k dielectrics: Implications for time-to-failure Achanta RS, Plawsky JL, Gill WN, Kim YH Thin Solid Films, 517(19), 5630, 2009 |
3 |
Copper ion transport induced dielectric failure: Inclusion of elastic drift and consequences for reliability Achanta RS, Plawsky JL, Gill WN Journal of Vacuum Science & Technology A, 26(6), 1497, 2008 |
4 |
Role of reactive surface oxygen in causing enhanced copper ionization in a low-k polymer Achanta RS, Gill WN, Plawsky JL, Haase G Journal of Vacuum Science & Technology B, 24(3), 1417, 2006 |