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| No. | Article |
|---|---|
| 1 |
Reactor-scale models for rf diode sputtering of metal thin films Desa S, Ghosal S, Kosut RL, Ebert JL, Abrahamson TE, Kozak A, Zou DW, Zhou X, Groves JF, Wadley HNG Journal of Vacuum Science & Technology A, 17(4), 1926, 1999 |