검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Modeling and simulation of feature-size-dependent etching of metal stacks Abdollahi-Alibeik S, Zheng J, McVittie JP, Saraswat KC, Gabriel CT, Abraham SC Journal of Vacuum Science & Technology B, 19(1), 179, 2001 |
| 2 |
Minimizing Metal Etch Rate Pattern Sensitivity in a High-Density Plasma Etcher Gabriel CT, Zheng J, Abraham SC Journal of Vacuum Science & Technology A, 15(3), 697, 1997 |
| 3 |
Performance of Different Etch Chemistries on Titanium Nitride Antireflective Coating Layers and Related Selectivity and Microloading Improvements for Submicron Geometries Obtained with a High-Density Metal Etcher Abraham SC, Gabriel CT, Zheng J Journal of Vacuum Science & Technology A, 15(3), 702, 1997 |