검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
High-Rate Electron-Cyclotron-Resonance Etching of GaN, Inn, and AIN Shul RJ, Howard AJ, Pearton SJ, Abemathy CR, Vartuli CB, Barnes PA, Bozack MJ Journal of Vacuum Science & Technology B, 13(5), 2016, 1995 |
| No. | Article |
|---|---|
| 1 |
High-Rate Electron-Cyclotron-Resonance Etching of GaN, Inn, and AIN Shul RJ, Howard AJ, Pearton SJ, Abemathy CR, Vartuli CB, Barnes PA, Bozack MJ Journal of Vacuum Science & Technology B, 13(5), 2016, 1995 |