검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Profile control of high aspect ratio trenches of silicon. II. Study of the mechanisms responsible for local bowing formation and elimination of this effect Boufnichel M, Aachboun S, Lefaucheux P, Ranson P Journal of Vacuum Science & Technology B, 21(1), 267, 2003 |
| 2 |
Profile control of high aspect ratio trenches of silicon. I. Effect of process parameters on local bowing Boufnichel M, Aachboun S, Grangeon F, Lefaucheux P, Ranson P Journal of Vacuum Science & Technology B, 20(4), 1508, 2002 |
| 3 |
Study of a mechanically clamped cryo-chuck device in a high density plasma for deep anisotropic etching of silicon Hibert C, Aachboun S, Boufnichel M, Ranson P Journal of Vacuum Science & Technology A, 19(2), 646, 2001 |
| 4 |
Cryogenic etching of deep narrow trenches in silicon Aachboun S, Ranson P, Hilbert C, Boufnichel M Journal of Vacuum Science & Technology A, 18(4), 1848, 2000 |
| 5 |
Deep anisotropic etching of silicon Aachboun S, Ranson P Journal of Vacuum Science & Technology A, 17(4), 2270, 1999 |