검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Dual-Plasma Reactor for Low-Temperature Deposition of Wide Band-Gap Silicon Alloys Etemadi R, Godet C, Perrin J, Drevillon B, Huc J, Parey JY, Rostaing JC, Coeuret F Journal of Vacuum Science & Technology A, 15(2), 320, 1997 |
| 2 |
Deposition Mechanism of Silicon-Nitride in Direct Photoassisted Chemical-Vapor-Deposition Using a Low-Pressure Hg Lamp Yoshimoto M, Takubo K, Ohtsuki T, Komoda M, Matsunami H Journal of the Electrochemical Society, 142(6), 1976, 1995 |
| 3 |
Mass-Spectrometric Studies of Remote Helium Plasma Dissociation of Silane Jasinski JM Journal of Vacuum Science & Technology A, 13(4), 1935, 1995 |
| 4 |
Modeling of Silicon-Nitride Deposition by RF Plasma-Enhanced Chemical-Vapor-Deposition Masi M, Besana G, Canzi L, Carra S Chemical Engineering Science, 49(5), 669, 1994 |
| 5 |
RESEARCH TO IMPROVE THE QUALITY OF HAZARD AND RISK ASSESSMENT FOR MAJOR CHEMICAL HAZARDS NUSSEY C Journal of Loss Prevention in The Process Industries, 7(2), 175, 1994 |