검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Structural and optical properties of RF magnetron sputtered aluminum nitride films without external substrate heating Singh AV, Chandra S, Srivastava AK, Chakroborty BR, Sehgal G, Dalai MK, Bose G Applied Surface Science, 257(22), 9568, 2011 |
| 2 |
Photoluminescence and characteristics of terbium-doped AlN film prepared by magnetron sputtering Liu FS, Ma WJ, Liu QL, Liang JK, Luo J, Yang LT, Song GB, Zhang Y, Rao GH Applied Surface Science, 245(1-4), 391, 2005 |
| 3 |
Effects of mean free path on the preferentially orientated growth of AlN thin films Chen YP, Wang RZ, Wang B, Xing T, Song XM, Zhu MK, Yan H Journal of Crystal Growth, 283(3-4), 315, 2005 |
| 4 |
Effect of Nonstoichiometry upon Optical-Properties of Radio-Frequency Sputtered Al-N Thin-Films Formed at Various Sputtering Pressures Wang DY, Nagahata Y, Masuda M, Hayashi Y Journal of Vacuum Science & Technology A, 14(6), 3092, 1996 |