검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Behavior of Si Atoms in a Silane Electron-Cyclotron-Resonance Plasma at High Dissociations Yamamoto Y, Hori M, Goto T, Hiramatsu M Journal of Vacuum Science & Technology A, 14(4), 1999, 1996 |
| No. | Article |
|---|---|
| 1 |
Behavior of Si Atoms in a Silane Electron-Cyclotron-Resonance Plasma at High Dissociations Yamamoto Y, Hori M, Goto T, Hiramatsu M Journal of Vacuum Science & Technology A, 14(4), 1999, 1996 |