검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Characteristics of low-temperature silicon nitride (SiNx : H) using electron cyclotron resonance plasma Bae S, Farber DG, Fonash SJ Solid-State Electronics, 44(8), 1355, 2000 |
| No. | Article |
|---|---|
| 1 |
Characteristics of low-temperature silicon nitride (SiNx : H) using electron cyclotron resonance plasma Bae S, Farber DG, Fonash SJ Solid-State Electronics, 44(8), 1355, 2000 |