검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Self-consistent simulation study on magnetized inductively coupled plasma for 450 mm semiconductor wafer processing Lee HJ, Kim YG Thin Solid Films, 521, 78, 2012 |
| No. | Article |
|---|---|
| 1 |
Self-consistent simulation study on magnetized inductively coupled plasma for 450 mm semiconductor wafer processing Lee HJ, Kim YG Thin Solid Films, 521, 78, 2012 |