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| No. | Article |
|---|---|
| 1 |
3D Free-Form Patterning of Silicon by Ion Implantation, Silicon Deposition, and Selective Silicon Etching Fischer AC, Belova LM, Rikers YGM, Malm BG, Radamson HH, Kolahdouz M, Gylfason KB, Stemme G, Niklaus F Advanced Functional Materials, 22(19), 4004, 2012 |