| 학회 |
한국화학공학회 |
| 학술대회 |
2009년 봄 (04/23 ~ 04/24, 광주 김대중컨벤션센터) |
| 권호 |
15권 1호, p.1190 |
| 발표분야 |
나노공정 및 나노소자기술(이홍희 교수 은퇴기념) |
| 제목 |
Device applications of anodic aluminum oxide nano-template |
| 초록 |
Novel ideas for nano-devices based on AAO nano-template are presented.High purity aluminum specimens were anodized twice to obtain well-ordered nano-channel arrays.Similar structured were also obtained from the thin aluminum layers deposited on the silicon wafers.These specimens were used for the fabrication of CNT field emitters for flat panel displays, ultra-high density CNT transistors, micro-cantilever arrays with the help of photolithography, mold for the nano-imprint lithography, and nano-vacuum tube arrays. |
| 저자 |
이건홍 |
| 소속 |
포항공과대 |
| 키워드 |
anodic aluminum oxide; nano-template; nanodevice
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| E-Mail |
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| VOD |
VOD 보기 |
| 원문파일 |
초록 보기 |
