| 초록 |
Solvent annealing method is effective to enhance the chain mobility of block copolymer and direct self-assembled structure. In this study, we investigated the stability of well-ordered structure in BCP films during annealing process with a neutral solvent to secure long-range lateral ordering in extended time window. The swelling ratio of BCP films was controlled during solvent annealing process, which was studied with in-situ ellipsometry, atomic forces microscope (AFM), scanning electron microscope (SEM), and grazing incidence small angle X-ray scattering (GISAXS). The morphology of BCP films were characterized in terms of defect annihilation of solvent annealed film. |
