| 학회 | 한국재료학회 |
| 학술대회 | 2005년 가을 (11/10 ~ 11/11, 한양대학교) |
| 권호 | 11권 2호 |
| 발표분야 | 전자재료 |
| 제목 | RF/DC 스퍼터링법에 의한 AZO(Zn:Al)박막특성 연구. |
| 초록 | Zinc oxide is a well-known wide band gap(3.36eV) and good optical properties which can be used many applications. So we prepared AZO thin film by RF/DC co-sputtering methode, and each of Zn:Al target was applied to deposit thin film with various power and oxygen ratio for improving the crystallographic properties of AZO thin film. In this work, we studied electrical and optical characteristics of AZO film depend on various sputtering conditions. |
| 저자 | 정종국, 임실묵 |
| 소속 | 한국산업기술대 |
| 키워드 | ZnO:Al; AZO; RF/DC magnetron sputtering; Transparent conductive oxides |
