| 학회 | 한국재료학회 |
| 학술대회 | 2007년 봄 (05/10 ~ 05/11, 무주리조트) |
| 권호 | 13권 1호 |
| 발표분야 | 반도체재료 |
| 제목 | A Study on the Charateristics of BZO Thin Films for TCO Electrodes Prepared by RF Magnetron Sputtering |
| 초록 | Zinc oxide have attractive considerable interest in recent year because they can be made to have high electrical conductivity ,high infrared reflectance, and high visible transmittance. These films have potential applications in energy efficient windows, solar cells, liquid crystal displays, and other optoelectronics devices. In this study properties of boron zinc oxide films growing using a conventional rf magnetron sputter, as well as effects of process variables on the film properties, are discussed in detail. The influence of the rf power, and argon/oxygen gas ratio on electrical, optical and morphological properties were investigated experimentally. The optical transmittance of BZO film of about 86% was obtained over the whole experimental ranges of argon pressures, substrate temperature and sputter power. Characterization analysis of the transparent conductive oxide thin films are carried out by Scanning Electron Microscope(SEM), 4 point probe method(4PPM), UV-visible spectrophotometer, X- ray diffraction(XRD), Hall measurement. |
| 저자 | Jihye Kim, Jaesung Hur, Jihoon Park, Jungbin Song, Samsuk Jang, Dongjin Byun |
| 소속 | Korea Univ. |
| 키워드 | BZO; Thin Films; Sputter |
