화학공학소재연구정보센터
학회 한국재료학회
학술대회 2013년 봄 (05/23 ~ 05/24, 여수 엠블호텔(THE MVL))
권호 19권 1호
발표분야 A. 전자/반도체 재료(Electronic and Semiconductor Materials)
제목 Optical Property of AZO Seed Layer by Aerosol Deposition Method and Hydrothermally Grown ZnO nanowire
초록 Zinc oxide (ZnO) has revealed as a promising compound semiconductor due to its advantages as optical devices emitting UV light. In general, hydrothermal is known as facile method to synthesize one-dimension (1D) nanostructures such as nanowires, nanotubes, nanorods. This method can be grown at a relatively low reaction temperature and to manufacture the 1D nano-materials on the substrate are needed to nucleation sites for seed layer. There are some ways to make seed layer such as sputtering, sol-gel method, atomic layer deposition (ALD) and aerosol-deposition (AD) method. In this study, we manufactured hydrothermally grown ZnO nanowires on aerosol deposited AZO seed layer with various aluminum doping conditions. The crystal structures of fabricated films and nanowires were identified by X-ray diffraction (XRD) system. The microstructures of surface were observed by field emission scanning electron microscopy (FESEM). Optical properties due to Al-doping concentration were measured by photoluminescence (PL) measurement system. As a result, the photoluminescence efficiency of ZnO nanowires was increased better than AZO seed layer.
저자 Min-Geun Choi1, Jungkeun Lee2, Soohwan Lee3, Young-Min Kong1, Jungho Ryu2, Dae-Yong Jeong3
소속 1School of Materials Engineering, 2Inha Univ., 3Korea
키워드 Aluminum doped ZnO; nanowire; Hydrothermal method; Aerosol deposition.
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