| 초록 |
In this presentation, Atomic layer deposition (ALD)/molecular layer deposition (MLD) processes are applied as the organic-inorganic hybrid multilayer, which has excellent property for the moisture barrier for the thin film encapsulation technology of flexible OLEDs. In this research, PET film was used for the flexible substrate, and 7-OTS (a self assembled monolayer (SAM) molecule) as the organic layer and TIP (titanium isopropoxide) as inorganic layer. The deposition temperature and pressure were 150℃ and 300mtorr, respectively. The moisture barrier property was estimated by measuring water vapor transmission rate (WVTR) by Ca test. |
